Gas management system and controller

ABSTRACT

Embodiments are directed to a gas supply system, a gas panel monitoring system and to a gas distribution platform controlled via a high availability computing cluster. In one case, a gas supply system is provided which includes a gas panel defining an enclosure that includes a gas dispensing manifold. Gas flow through the gas dispensing manifold is regulated using solenoids. The gas supply system also includes a redundant control system that is electrically connected to the solenoids. The redundant control system is configured to send actuation signals to the solenoids to allow or prevent gas from flowing through the gas dispensing manifold. The gas supply system further includes a communications module that allows the redundant control system to monitor multiple gas panels. The monitoring includes receiving feedback from gas cabinet components regarding component operational status, and also transmitting actuation signals from the redundant control system to the gas panel.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims priority to and the benefit of U.S. ProvisionalApplication No. 62/260,156, entitled “FLOW CONTROL, RFID OPERATORVALIDATION AND CENTRALIZED MANAGEMENT”, which was filed on Nov. 25,2015, and which is incorporated by reference in its entirety herein.

BACKGROUND

Gas and liquid provisioning systems have long been used in themanufacturing industry. Semiconductor fabrication assemblies, solarpanel manufacturing facilities and other types of industrial productionmachines and facilities use controlled amounts of gases and liquids inthe production of high-tech goods. Typically, however, the gas supplymachines that supply the gas and other liquids are custom built for onetype of tool, and do not work with other tools. Moreover, any softwareprogramming applied in the gas supply machines is custom coded onto aprogrammable logic device (PLC), which is expensive and provides asingle point of failure in the system.

BRIEF SUMMARY

Embodiments described herein are directed to a gas supply system, a gaspanel monitoring system and to a gas distribution platform controlledvia a high availability computing cluster. In one embodiment, a gassupply system is provided which includes a gas panel defining anenclosure that includes a gas dispensing manifold, where gas flowthrough the gas dispensing manifold is regulated using solenoids. Thegas supply system also includes a redundant control system that iselectrically connected to the solenoids. The redundant control system isconfigured to send actuation signals to the solenoids to allow orprevent gas from flowing through the gas dispensing manifold. The gassupply system further includes a communications module that allows theredundant control system to monitor a plurality of gas panels. Themonitoring includes receiving feedback from gas cabinet componentsregarding component operational status, and also transmitting actuationsignals from the redundant control system to the gas panel.

In another embodiment, a gas panel monitoring system is provided. Thegas panel monitoring system includes cameras positioned in view of a gaspanel, which is located within a controlled access area. The gas panelmonitoring system also includes cameras positioned in view of an accessdoor that allows entrance into to the controlled access area. Alsoincluded is an equipment recognition system configured to determinewhether pieces of equipment are being taken into the controlled accessarea and, if so, identify which pieces of equipment are being taken intothe controlled access area. A controller is also provided in the gaspanel monitoring system, which is configured to monitor video feed datafrom the cameras to verify that safety protocol steps related to theidentified pieces of equipment are being followed before access to thegas panel in the controlled access area is granted.

In another embodiment, a gas distribution platform controlled via a highavailability computing cluster is provided. The gas distributionplatform includes multiple gas panels each defining an enclosureincluding therein a gas dispensing manifold, where gas flow through thegas dispensing manifold is regulated using solenoids. The gasdistribution platform also includes a high availability computingcluster configured to receive information from and communicateinformation to the plurality of gas panels.

The high availability computing cluster includes a first computingsystem that controls the gas panels. The first computing system has anassigned internet protocol (IP) address and is configured to host a webserver via a shared IP address. The high availability computing clusteralso includes a second computing system that acts as a backup to thefirst computing system. The second computing system also has an assignedIP address. The first and second computing systems are interchangeablewith each other, so that if the first computing systems fails, thesecond computing system will assume control of the gas panels, and willtake over hosting the web server via the shared IP address. The highavailability computing cluster further includes at least one softwareapplication running independently on both the first and second computingsystems, which is configured to operate the gas panels. Still further,the high availability computing cluster includes a redundant hardwareinterface configured to communicate commands generated by the softwareapplication with the gas panels.

This Summary is provided to introduce a selection of concepts in asimplified form that are further described below in the DetailedDescription. This Summary is not intended to identify key features oressential features of the claimed subject matter, nor is it intended tobe used as an aid in determining the scope of the claimed subjectmatter.

Additional features and advantages will be set forth in the descriptionwhich follows, and in part will be apparent to one of ordinary skill inthe art from the description, or may be learned by the practice of theteachings herein. Features and advantages of embodiments describedherein may be realized and obtained by means of the instruments andcombinations particularly pointed out in the appended claims. Featuresof the embodiments described herein will become more fully apparent fromthe following description and appended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

To further clarify the above and other features of the embodimentsdescribed herein, a more particular description will be rendered byreference to the appended drawings. It is appreciated that thesedrawings depict only examples of the embodiments described herein andare therefore not to be considered limiting of its scope. Theembodiments will be described and explained with additional specificityand detail through the use of the accompanying drawings in which:

FIG. 1 illustrates an embodiment of a gas supply system that controlsmultiple gas panels.

FIG. 2 illustrates an embodiment of a gas panel monitoring system thatcontrol access to gas panels in a controlled area.

FIG. 3 illustrates an embodiment of a high availability computingcluster that controls devices such as gas panels.

FIG. 4 illustrates an embodiment of a gas supply system managementapplication used to control gas supply systems.

FIG. 5 illustrates an embodiment of a gas distribution platform thatincludes a high availability computing cluster.

DETAILED DESCRIPTION

Embodiments described herein are directed to a gas supply system, a gaspanel monitoring system and to a gas distribution platform controlledvia a high availability computing cluster. In one embodiment, a gassupply system is provided which includes a gas panel defining anenclosure that includes a gas dispensing manifold, where gas flowthrough the gas dispensing manifold is regulated using solenoids. Thegas supply system also includes a redundant control system that iselectrically connected to the solenoids. The redundant control system isconfigured to send actuation signals to the solenoids to allow orprevent gas from flowing through the gas dispensing manifold. The gassupply system further includes a communications module that allows theredundant control system to monitor a plurality of gas panels. Themonitoring includes receiving feedback from gas cabinet componentsregarding component operational status, and also transmitting actuationsignals from the redundant control system to the gas panel.

In another embodiment, a gas panel monitoring system is provided. Thegas panel monitoring system includes cameras positioned in view of a gaspanel, which is located within a controlled access area. The gas panelmonitoring system also includes cameras positioned in view of an accessdoor that allows entrance into to the controlled access area. Alsoincluded is an equipment recognition system configured to determinewhether pieces of equipment are being taken into the controlled accessarea and, if so, identify which pieces of equipment are being taken intothe controlled access area. A controller is also provided in the gaspanel monitoring system, which is configured to monitor video feed datafrom the cameras to verify that safety protocol steps related to theidentified pieces of equipment are being followed before access to thegas panel in the controlled access area is granted.

In another embodiment, a gas distribution platform controlled via a highavailability computing cluster is provided. The gas distributionplatform includes multiple gas panels each defining an enclosureincluding therein a gas dispensing manifold, where gas flow through thegas dispensing manifold is regulated using solenoids. The gasdistribution platform also includes a high availability computingcluster configured to receive information from and communicateinformation to the plurality of gas panels.

The high availability computing cluster includes a first computingsystem that controls the gas panels. The first computing system has anassigned internet protocol (IP) address and is configured to host a webserver via a shared IP address. The high availability computing clusteralso includes a second computing system that acts as a backup to thefirst computing system. The second computing system also has an assignedIP address. The first and second computing systems are interchangeablewith each other, so that if the first computing systems fails, thesecond computing system will assume control of the gas panels, and willtake over hosting the web server via the shared IP address. The highavailability computing cluster further includes at least one softwareapplication running independently on both the first and second computingsystems, which is configured to operate the gas panels. Still further,the high availability computing cluster includes a redundant hardwareinterface configured to communicate commands generated by the softwareapplication with the gas panels.

As shown in environment 100 of FIG. 1, a gas supply system 101 caninclude many different components. The gas supply system 101 uses thesecomponents to deliver gas, liquids or other materials to machinery,tools, devices or other items that use the gas or other materials. Forexample, fabrication assemblies used to make semiconductors or solarpanels use many different kinds of gases in the construction of siliconwafers. Some of these gases are extremely corrosive or otherwise unsafefor human contact. Many of the gases need to be delivered to themachinery at a specified pressure and/or flow rate. Accordingly, the gassupply system 101 can use its various components to regulate and controlthe flow of gas or other materials from a gas source, through the gassupply system 101, and on to a tool or machine.

In at least some embodiments, the flow of gas may be fed through a gaspanel 102 with various components. The gas panel 102 may include anenclosure that has a gas dispensing manifold 103. The gas dispensingmanifold may be designed to receive one or more different gas inputfeeds, and route the gas to one or more different outputs. Gas flowthrough the gas dispensing manifold 103 may be regulated using one ormore solenoids 104. The solenoids, in response to an electrical controlsignal (e.g. actuation signal 109), open or close a valve that eitherprevents or permits gas to flow through the manifold 103. The solenoids104 may, for example, control valves that sit between the gas storagevessels 105 and the gas dispensing manifold 103.

The solenoids are activated using an activation signal 109 sent from aredundant control system 110. The redundant control system 110 iselectrically connected to the solenoids 104, and is configured to sendactuation signals 109 at specified times to the solenoids 104 to allowor prevent gas from flowing through the gas dispensing manifold 103. Theredundant control system may include various hardware componentsincluding a server (e.g. a blade server), a backup server and aredundant hardware controller. These components may be part of themirrored control system 111. The mirrored control system 111 may befully capable of taking over the monitoring and control of the gaspanels normally performed by the redundant control system 110. Theredundant control system 110 may operate the gas panel 102 based onfeedback received from the manifold 103, from the solenoids 104, fromthe gas storage vessels 105 or from other components 106 in the gaspanel. This feedback 107 is received via a communications module 112.

The communications module 112 allows the redundant control system 110 tomonitor the gas panel 102, as well as other gas panels 108 that may bein the immediate area of gas panel 102, or may be remote to gas panel102. The monitoring performed by the communications module 112 mayinclude receiving feedback 107 from gas cabinet components regardingcomponent operational status. The operational status may indicate a gasflow rate, pressure, volume, temperature, time of operation, or otheroperational status information. The communications module 112 mayreceive and assimilate this information, and send all or portions of itto the redundant control system 110. In some cases, the communicationsmodule may then receive actuation signals from the redundant controlsystem 110 and forward those signals to the gas panel 102 and/or toother gas panels 108.

The gas panel 102 may be constructed in substantially any shape or size,and may be configured to hold many different types of components. Forinstance, the gas panel 102 may include gas storage and dispensingvessels 105. These gas storage vessels may be mounted in the enclosureof the gas panel 102, and may be joined in gas flow communication withthe gas dispensing manifold 103. Many other components 106 includingsolenoids 104, pressure transducers, switches, valves, and even thecommunications module 112 and the redundant control system 110 may bemounted in the gas panel 102. The gas panel itself may be mounted orotherwise set up within a room of a manufacturing building. In somecases, this room is in a controlled access area.

Indeed, in some embodiments, the gas panel 102 and/or the redundantcontrol system 110 are located in a secure room that is only accessibleto authorized persons. The authorized persons provide credentialsindicating proof of identity. Such proofs of identity may includeusername and password, personal identification number (PIN), biometricauthentication (e.g. fingerprint, eye scan, voice recognition),electronic badges or cards that communicate with a secure reader (e.g.Bluetooth or RFID readers), or other type of authentication. Once theuser has been identified, they system may determine that the user has alist of certifications. These certifications may allow the user toperform certain tasks within the secure room that houses the gas panel102. This secure room may be monitored using the gas panel monitoringsystem 201 of FIG. 2, as explained further below.

The redundant control system 110 of FIG. 1 has at least one secondary,mirrored control system 111 that can assume control of the gas panel ondemand. Although only one mirrored control system 111 is shown in FIG.1, it will be understood that substantially any number of mirroredcontrol systems may be put in place to support the gas supply system 101as failover devices. The mirrored control system 111 may include thesame or different hardware than the redundant control system 110, whichitself includes at least one hardware processor, at least some systemmemory, and at least some data storage with computer executableinstructions that, when executed, perform software methods. Theredundant control system 110 can, for example, receive feedback inputs107 from gas panel components and determine how to operate the gas panelcomponents based on these inputs.

If, for example, pressure is too high, a valve manifold box (VMB) may beused within the gas panel 102 to lower the pressure and regulate theflow of gases through the gas dispensing manifold 103. Thus, theredundant control system can ensure that pressure and flow to anymachinery or tools that are connected to the gas panel 102 remainssubstantially constant. In traditional systems, only the regulatorsupports flow from the gas cabinet, which leads to pressureirregularities and lack of precise control over pressure and flow. Thevalve manifold box may include or may be connected to an electronicpressure regulator that controls gas pressure to an inlet of a mass flowcontroller (MFC) which itself controls gas flow in the gas panel. Thus,the gas panel 102 allows use of an electronic pressure regulator that isnot susceptible to droop and does not have deleterious supply pressureeffects.

The electronic pressure regulator may be a dome loaded pressureregulator, an electro-pneumatic pressure regulator, or some other kindof regulator. Each of these regulators may be configured to receivecontrol signals issued by the redundant control system. In this manner,the redundant control system 110 may be used to control the operation ofthe pressure regulator, in addition to the other components of the gaspanel 102. In some cases, pressure feedback readings at the mass flowcontroller may be provided to the dome loaded pressure regulator or tothe electro-pneumatic pressure regulator to control gas line pressure.These regulators take input signals from the redundant control system110, which tells the regulators what pressures they need to be at.

In some embodiments, a pressure transducer may be moved downstream pastthe mass flow controller, and may read the pressure in the line andcommunicate it back to the pressure regulator. The pressure regulatorincreases or decreases the pressure on the dome of the regulator tomaintain the set point pressure. The downstream MFC is used to thencontrol the flow, once the pressure has been set and stabilized.Feedback from tools or machinery receiving the gas flow may be providedto the redundant control system 110. The redundant control system 110can then use the communications module 112 to communicate changes to theMFC, if needed, regarding what amount of flow it needs to deliver.

The dome loaded regulator thus provides stable pressure, and the MFCadjusts the flow to deliver what is demanded by the tool or machinery.Both the MFC and pressure regulator can operate using digital or analoginput signals. As such, the redundant control system 110 can beprogrammed to provide the proper analog or digital signals. If anoperator needed to change the MFC, an isolation valve and purge valvemay be placed in front of the MFC and behind a vent valve and anisolation valve. The pressure transducer would then sit between the MFCand the vent valve and, as such, would be able to monitor an ensuingpurge sequence.

In some embodiments, the communications module 112 of the gas supplysystem 101 may additionally be configured to provide remote access tothe redundant control system 110. For example, the communications module112 may be able to receive commands or messages from other computingsystems such as portable electronic devices. By allowing remote access,the redundant control system 110, can be accessed at any time fromsubstantially any location with an internet connection. Thus, as will beshown further in FIG. 4 below, a remote user may monitor and/or controlthe functionality of the gas supply system 101 via a portable electronicdevice such as a cell phone, tablet or laptop.

Turning now to environment 200 of FIG. 2, a gas panel monitoring system201 is provided. The gas panel monitoring system 201 includes one ormore cameras (204 and 207) positioned in view of at least one gas panel(203). The gas panel 203 is located within a controlled access area 202.The controlled access area may be any type of room or location that isoff limits to the public. For instance, the controlled access area 202may be a room that is sectioned off via a door 206. The door may have anelectronic identification device 209 that allows or prevents entry intothe controlled access area 202. The electronic identification device 209may, for example, perform biometric scans, or may be an RFID reader thatreads the identification tags of the persons 208 wanting to enter theroom.

The persons 208 may be qualified workers who perform tasks within thecontrolled access area 202. For instance, gas containing vessels orother equipment 210 may need to be changed within the gas panel 203. Insome cases, these gas containing vessels are only to be changed out bypersons having a specified level of training or certification. Theelectronic identification device 209 can thus verify the identity of thepersons 208 attempting to access the controlled access area 202, and candetermine, based on their identity, whether they possess the necessarytraining or qualifications to enter and perform those tasks. The camera207 may be used to further ensure the identity of the persons ordetermine that the appropriate number of persons is present to perform atask. For example, some gas panel tasks require two qualified workers.The camera 204 may also be used for these purposes, as it can monitorthe gas panel 203 and what goes on in relation to that panel.

The camera 207 may be used as the sole means of verification prior topermitting access to the controlled access area 202, or the camera 207may be used in conjunction with the electronic identification device 209and/or other identity verifying devices. An equipment recognition system214 may be used determine whether pieces of equipment are being takeninto the controlled access area and, if so, to identify which pieces ofequipment are being taken into the controlled access area 202. Theequipment recognition system 214 may use the camera 207 and/or otherdevices such as RFID readers 215 to determine which pieces of equipmentare being brought into the controlled access area 202.

The equipment 210 may, for example, have RFID chips affixed thereto, andmay use these chips to identify the equipment type and learn othercharacteristics about the equipment including size, quantity,manufacturer, production date, compatibility with the gas panel or otherpertinent information. The equipment recognition system 214 may thus beused in conjunction with the camera 207 and/or the electronicidentification device 209 to identify which persons 208 are entering thecontrolled access area 202, and which pieces of equipment are enteringthe controlled access area.

The gas panel monitoring system 201 also includes a controller 211 thatmonitors video feed data 205 from the cameras (204 and/or 207) to verifythat safety protocol steps 213 related to the identified pieces ofequipment are being followed before access to the gas panel in thecontrolled access area is granted. For instance, if safety protocolrequires that the persons 208 are wearing certain protective outerwear,the controller 211 could monitor the video feed data to determinewhether the persons were wearing that gear. If the safety protocol steps213 require that two persons be in the controlled access area 202 toperform a task on the gas panel 203, the controller 211 may again lookat the video feed data 205 and/or information from the electronicidentification device 209 to determine that two persons are entering. Ifsafety protocol steps 213 required that the persons each have aspecified certification, or that the gas panel could only havecomponents from a certain manufacturer, or that only certain types ofgases or chemicals could be present in the controlled access area 202,the controller 211 may use the various inputs from the gas panelmonitoring system 201 to determine whether certain safety protocol steps213 are being taken. If these protocols are not followed, the controller211 may sound an alarm or other alert.

Thus, in this manner, the gas panel monitoring system 201 preventsunauthorized or noncertified persons from accessing the controlledaccess area 202. The electronic identification device 209 grants orprevents access to the controlled area 202 based on electronicidentifiers provided to the electronic identification device. The gaspanel monitoring system 201 thus knows who the operators are and whattheir qualifications are. If unauthorized operators attempt to accessthe controlled access area 202, they may be locked out and preventedfrom such access. If a job requires two qualified operators, and both ofthe operators' badges have not been read, the controller 211 can preventthe operators from accessing the area. This helps ensure that safetyprotocols are followed, which is especially important when dealing withhighly volatile or toxic chemicals. The controller 211 may be programmedto make decisions on safety protocol compliance without humanintervention. Thus, the controller 211 can access the various videofeeds and electronic identification device information to independentlymake decisions on whether safety protocol is being followed, and allowor prevent access to the controlled access area 202 based on thosedecisions.

The gas panel monitoring system may also include a display device 216that is configured to display video feed data 205 from the cameras 204and 207 positioned in view of the gas panel and the entrance to thecontrolled access area 202. The display device 216 may be local to thegas panel 202 or may be remote. For instance, the display device 216 maybe part of a mobile electronic device or other remote computing system.The display allows users such as mangers or other operators to receivevisual confirmation of gas system's operation. This is shown in greaterdetail in FIG. 4.

A mobile device 408 or other electronic device may be equipped with agas supply system management software application 401. The application401 may provide access to controllers 402 (such as the controller 211 ofFIG. 2), switches 403 or other hardware components or devices within agas supply system (e.g. 101 of FIG. 1). The application 401 may show thecurrent operational status 404 of various components including pressure405, flow rate 406, or other desired status indicators. The application401 may also be configured to show the video feed data 205 from thecameras 204 and 207. As such, a user 407 may be able to view currentstatus information for any of the components of the gas supply system,and may also be able to send actuation signals to the various componentsto operate those components in accordance with design specifications.

Thus, video feed data 205 of FIG. 2 from the camera positioned in viewof the at least one gas panel 202 (i.e. camera 204), and video feed datafrom the camera positioned in view of the access door 206 (i.e. camera207) can be provided to the portable electronic device 408 of FIG. 4 formonitoring. The handheld electronic device may be configured to showsthe facility location for each system, and allows synchronization of thedevice with the gas supply system 101 and/or the gas panel monitoringsystem 201 for gas change or maintenance operations. The softwareapplication 401 may be programmed to guard against unintendedoperations, or may provide promptings to stay within the safety protocolsteps 213. The software application 401 may also be programmed toauthenticate users prior to receiving or issuing any commands to the gassupply system. Only when a user is authenticated and known to the systemwill gas supply system commands be accepted.

The gas supply system management application 401 may be provided on asingle computing system, or may be provided from a distributed,redundant computing system. For instance, in environment 300 of FIG. 3,a high availability computing cluster 301 is provided. The highavailability cluster 301 includes two or more computing systems (303Aand 303B) with the same (or similar) software applications for operatinga gas supply system or “gas panel.” Each of the two or more computingsystems has its own internet protocol (IP) address so as to beidentified within a network. While each of the computing systems has itsown IP address, the computing systems may share a common IP address. Incases where more than two computing systems are used, all of thecomputing systems in the pool may share the same common IP address.External data requests may use the common IP address to communicate withthe high availability computing cluster 301 in general.

As shown in FIG. 3, the single board computer A (303A) may be configuredas the default computer among the pool of computing systems that will beoperating the gas supply system 101 and/or the gas panel monitoringsystem 201. Computer 303B may be configured to enter a standby modewhere it listens to the operating state of the hardware device. If, forsome reason, computer 303A fails, computer 303B will take over thecontrol of the gas panel seamlessly and automatically. Additionally oralternatively, computer 303A may be configured to host a web server orother application (e.g. application 401). If computer 303A goes down,then computer 303B may be configured to host the web server or otherapplication via the shared IP address.

Each of the computers in the pool of computing systems iscommunicatively connected (e.g. via USB or Bluetooth) to the redundanthardware interface printed circuit board (PCB) 307. The PCB board 307may include one or more microcontrollers that are connected to variousperipheral devices that are part of the gas supply system or monitoringsystem. For example, the microcontrollers may be responsible foroperating one or more physical components of a gas cabinet such aspumps, solenoids 308, pressure transducers 309, switches 310, valves, orother devices. These microcontrollers communicate to their respectivecluster computing systems (e.g. computer 303A or computer 303B) via USBor other wired or wireless connection. The microcontroller that isconnected to the high availability computing cluster 301 and iscurrently in control is the microcontroller that communicates to theperipheral devices. In such cases, the other microcontroller(s) act as abackup to the active microcontroller.

The health of the high availability computing cluster computers, as wellas the health of the PCB microcontrollers 307, may be monitored using acontinuous “heartbeat” signal. For the cluster computers, this heartbeatsignal may be sent via a network router 302 such as an Ethernet router.The microcontrollers on the PCB board send their heartbeat via the USBor other wired or wireless connections. The high availability computingcluster 301 may be powered by a dual power supply unit 306. The dualpower supply unit 306 provides a pair of power supplies where, at leastin some cases, only one power supply is needed to operate the hardwaredevice. In such cases, the second power supply acts as a backup if thefirst power supply fails.

Embodiments of the high availability computing cluster described hereinmay implement various types of computing systems. These computingsystems may take a wide variety of forms. For instance, computingsystems may be mobile phones, electronic appliances, laptop computers,tablet computers, wearable devices, desktop computers, mainframes, andthe like. As used herein, the term “computing system” includes anydevice, system, or combination thereof that includes at least oneprocessor, and a physical and tangible computer-readable memory capableof having thereon computer-executable instructions that are executableby the processor. A computing system may be distributed over a networkenvironment and may include multiple constituent computing systems.

A computing system typically includes at least one hardware processingunit and a memory. The memory may be physical system memory, which maybe volatile, non-volatile, or some combination of the two. The term“memory” may also be used herein to refer to non-volatile mass storagesuch as physical storage media or physical storage devices. If thecomputing system is distributed, the processing, memory and/or storagecapability may be distributed as well.

As used herein, the term “executable module” or “executable component”can refer to software objects, routines, methods, or similarcomputer-executable instructions that may be executed on the computingsystem. The different components, modules, engines, and servicesdescribed herein may be implemented as objects or processes that executeon the computing system (e.g., as separate threads). As describedherein, a computing system may also contain communication channels thatallow the computing system to communicate with other message processorsover a wired or wireless network. Such communication channels mayinclude hardware-based receivers, transmitters or transceivers, whichare configured to receive data, transmit data or perform both.

Embodiments described herein also include physical computer-readablemedia for carrying or storing computer-executable instructions and/ordata structures. Such computer-readable media can be any availablephysical media that can be accessed by a general-purpose orspecial-purpose computing system.

Computer storage media are physical hardware storage media that storecomputer-executable instructions and/or data structures. Physicalhardware storage media include computer hardware, such as RAM, ROM,EEPROM, solid state drives (“SSDs”), flash memory, phase-change memory(“PCM”), optical disk storage, magnetic disk storage or other magneticstorage devices, or any other hardware storage device(s) which can beused to store program code in the form of computer-executableinstructions or data structures, which can be accessed and executed by ageneral-purpose or special-purpose computing system to implement thedisclosed functionality of the embodiments described herein. The datastructures may include primitive types (e.g. character, double,floating-point), composite types (e.g. array, record, union, etc.),abstract data types (e.g. container, list, set, stack, tree, etc.),hashes, graphs or other any other types of data structures.

As used herein, computer-executable instructions comprise instructionsand data which, when executed at one or more processors, cause ageneral-purpose computing system, special-purpose computing system, orspecial-purpose processing device to perform a certain function or groupof functions. Computer-executable instructions may be, for example,binaries, intermediate format instructions such as assembly language, oreven source code.

Those skilled in the art will appreciate that the principles describedherein may be practiced in network computing environments with manytypes of computing system configurations, including, personal computers,desktop computers, laptop computers, message processors, hand-helddevices, multi-processor systems, microprocessor-based or programmableconsumer electronics, network PCs, minicomputers, mainframe computers,mobile telephones, PDAs, tablets, pagers, routers, switches, and thelike. The embodiments herein may also be practiced in distributed systemenvironments where local and remote computing systems, which are linked(either by hardwired data links, wireless data links, or by acombination of hardwired and wireless data links) through a network,both perform tasks. As such, in a distributed system environment, acomputing system may include a plurality of constituent computingsystems. In a distributed system environment, program modules may belocated in both local and remote memory storage devices.

Those skilled in the art will also appreciate that the embodimentsherein may be practiced in a cloud computing environment. Cloudcomputing environments may be distributed, although this is notrequired. When distributed, cloud computing environments may bedistributed internationally within an organization and/or havecomponents possessed across multiple organizations. In this descriptionand the following claims, “cloud computing” is defined as a model forenabling on-demand network access to a shared pool of configurablecomputing resources (e.g., networks, servers, storage, applications, andservices). The definition of “cloud computing” is not limited to any ofthe other numerous advantages that can be obtained from such a modelwhen properly deployed.

Still further, system architectures described herein can include aplurality of independent components that each contribute to thefunctionality of the system as a whole. This modularity allows forincreased flexibility when approaching issues of platform scalabilityand, to this end, provides a variety of advantages. System complexityand growth can be managed more easily through the use of smaller-scaleparts with limited functional scope. Platform fault tolerance isenhanced through the use of these loosely coupled modules. Individualcomponents can be grown incrementally as business needs dictate. Modulardevelopment also translates to decreased time to market for newfunctionality. New functionality can be added or subtracted withoutimpacting the core system.

As mentioned above, FIG. 3 illustrates a high availability computingcluster 301. The high availability computing cluster may include manydifferent electrical and non-electrical components. These components maybe contained in a housing, or may be external to the housing. Thecomponents may include a router 302, such as an Ethernet router, whichallows communication between the high availability computing cluster andexternal computing systems. For example, the Ethernet router may connectthe high availability computing cluster to a customer's network, eitherdirectly or indirectly.

The high availability computing cluster 301 further includes two or morecomputing systems with the same (or similar) software applicationsrunning thereon. The software applications may be configured to operateor control a hardware devices or components of the gas supply system 101and/or the gas panel monitoring system 201. The gas control system maybe a combination of components and controls that regulate the flow ofcertain gases within an environment. For instance, as noted above, in asemiconductor fabrication assembly, many different toxic and non-toxicchemicals and gases are used in the fabrication process. These gases andchemicals need to be delivered efficiently, safely, and reliably. Gascontrol systems provide such functionality. The high availabilitycomputing cluster described herein may interoperate with a gas controlsystem to control the various valves, switches, pumps, electroniccontrols and other components that control operation of the system.

The cluster of FIG. 3 includes computing systems 303A and 303B. Eachcomputer in the cluster has its own IP address so as to be identifiedwithin the network. The cluster may also have a common IP address thatis shared by the other computer systems in the cluster. The common IPaddress allows external users or computing systems to communicate withthe cluster, regardless of which computer system is actually responding.

As shown in FIG. 3, computer 303A may be set up as the default computerin the cluster of computing systems. The default computer system is thecomputer system that operates the gas supply system. Computer 303B (andany other computer systems in the cluster) may be designed to enter astandby mode. In standby mode, computer system 303B listens to theoperating state of the gas supply system components. If, for somereason, computer 303A fails, computer 303B (or one of the other computersystems in the cluster) will take over the control of the gas cabinet orother device automatically without downtime. Computer 303A may be alsobe configured to instantiate a web server or other application. Ifcomputer 303A fails, then computer 303B seamlessly takes over hostingthe web server or other application via the shared IP address.

Each of the computers in the pool of computing systems iscommunicatively connected (e.g. via USB or Bluetooth) to the redundanthardware interface (RHI) board 307. The RHI board may include multiplemicrocontrollers that are connected to peripheral devices that are partof the hardware device. For example, as mentioned above, in cases wherea gas panel is being controlled or monitored, the microcontrollers onthe RHI board 307 may be responsible for operating physical componentsof the gas cabinet such as pumps, solenoids, transducers, switches, etc.These microcontrollers communicate to their respective cluster computingsystems (e.g. computer 303A or computer 303B) via USB or other wired orwireless connection. One of the microcontrollers may be set up as thedefault, while other controllers act as a backup to the defaultmicrocontroller.

The computer systems 303A and 303B are interchangeable with each other,so that if the first computing systems fails, the second computingsystem will assume control of the hardware devices, and will furthertake over hosting the web server via the shared IP address. The highavailability computing cluster also includes at least one softwareapplication running independently on both the first and second computingsystems. The software application is configured to operate the gassupply system using software commands and routines. The highavailability computing cluster 301 includes a redundant hardwareinterface 307 configured to communicate commands generated by thesoftware application with the components of the gas supply system.

Each component on the gas control system may be individuallycontrollable by the high availability computing cluster using thesoftware application and the microcontrollers. It should be noted thatwhile a gas supply and monitoring system has been used as an exampleherein, many different types of hardware devices may be implementedwith, controlled by and maintained by the high availability computingcluster, including HVAC units, solar arrays, water distribution systems,power grids, battery arrays or other systems.

Users may interact with the software application using a touchscreen 305or other user interface. For instance, as shown in FIG. 3, a touchscreendisplay 305 may be provided, using which a user may change settings oroperational features of the hardware device that is being controlledusing the high availability computing cluster 301. The controls for thegas cabinet or other hardware device may be displayed in a web browser304 or other application such as a standalone application. Thisapplication may be provided by a web server hosted on the one of thecomputing systems of the high availability computing cluster.

The first, second and any other computing systems in the highavailability computing cluster may each be hot-swappable. As such, eachcomputing system may be removed or replaced at any time, withoutaffecting the functionality of the high availability computing cluster(assuming that at least one computing system remains) in the cluster301. In some cases, one of the computing systems may be established as adefault computing system for the high availability computing cluster.The default computing system hosts the web server and/or otherapplications, and interfaces with the RHI board 307. The second, thirdor subsequent computing systems may be put into standby mode, listeningto the operating state of the default computing system. If the computingsystems on standby mode determine that the default computing system hasfailed, they may appoint one computing system be the new defaultcomputing system and to assume its duties.

In some cases, computer 303B may be further configured to monitor datareceived from the gas supply and monitoring systems. For instance, thegas panel monitoring system 201 may output video feed data as part ofits normal operation. The gas supply system 101 of FIG. 1 may receivefeedback data 107 from various components or devices. The data may berelated to its operational parameters or current operating state (e.g.gas flow rate, internal temperature, line pressure, current or voltagelevels, or other parameters). The data may be analyzed by the computersystems in the high availability computing cluster 301, and/or may betransmitted to an external computing system (e.g. a cloud system) foranalysis and storage.

The redundant hardware interface 307 of the high availability computingcluster may be a printed circuit board (PCB) or other electricalcomponent or platform that can function as a hardware interface. Thecomputing systems of the high availability computing cluster areconnected to the RHI PCB 307 via a wired or potentially wirelessconnection. For example, computer 303A and computer 303B in the highavailability computing cluster 301 may be connected via USB to the RHIPCB. The RHI board includes at least two microcontrollers that areconnected to the system that is to be controlled. The microcontrollersare either directly or indirectly connected to peripheral hardwaredevices that are part of the sysstem. For instance, the microcontrollersmay be directly or indirectly connected to the solenoids, transducers,switches, valves and/or pumps that control the functionality of a gascontrol system.

In cases where multiple microcontrollers are apportioned on the RHIboard 307, the microcontroller that is connected to the computing systemand that is currently in control of the hardware device is themicrocontroller that communicates to the peripheral hardware devices.Thus, in the gas supply system example, if a microcontroller is incontrol of the gas supply system, it is also the microcontroller thatcommunicates with the switches, pumps and other peripheral hardwaredevices of the gas supply system 101. Other microcontrollers in thesystem may be placed in standby mode, and may watch for failures of theactive microcontroller.

This watching or monitoring the health of the microcontrollers may alsobe applied to the computing systems of the high availability computingcluster 301. Indeed, a continuous heartbeat signal may be sent outthrough the Ethernet router 302. Each component may respond to theheartbeat signal and provide operational state information. Thisoperational state information may indicate how well the component isworking, and may indicate whether a failure has happened or is imminent.Redundancy may also be provided by dual power supplies. A dual powersupply unit may include two or more separate power supplies. In caseswhere only one of the two power supplies 306 is needed to operate thehigh availability computing cluster and/or the one or more hardwaredevices, the other power supply can act as a backup, and can switch overseamlessly when needed.

Turning now to environment 500 of FIG. 5, a gas distribution platform501 is provided. The gas distribution platform 501 may be controlled viathe high availability computing cluster 301 of FIG. 3, and accessed orcontrolled via the gas supply system management application 401 of FIG.4. The gas distribution platform 501 includes multiple gas panels 502.Each of these gas panels has an enclosure that includes a gas dispensingmanifold (e.g. 103 of FIG. 1). Gas flow through the gas dispensingmanifold is regulated using solenoids 104. The gas distribution platform501 also includes a high availability computing cluster 503 such as 301described above in conjunction with FIG. 3. The high availabilitycomputing cluster 503 is configured to receive information from andcommunicate information to the various gas panels 502.

The high availability computing cluster 503 includes a first computingsystem 504 that controls one or more of the gas panels 502. The firstcomputing system has an assigned internet protocol (IP) address and isconfigured to host a web server via a shared IP address. The highavailability computing cluster 503 also includes a second computingsystem 505 that acts as a backup to the first computing system. Thesecond computing system also has an assigned IP address. The first andsecond computing systems 504 and 505 are interchangeable with eachother. As such if the first computing systems 504 fails, the secondcomputing system 505 will assume control of the gas panels 502, and willtake over hosting the web server via the shared IP address. The highavailability computing cluster 503 also has at least one softwareapplication 509 running independently on both the first and secondcomputing systems 504 and 505. The software application 509 allows auser 507 to operate the gas panels 502. A redundant hardware interface506 includes microcontrollers that are configured to communicatecommands generated by the software application with the gas panels 502.

The first and second computing systems 504 and 505 are hot-swappable, asare any other computing systems included in the high availabilitycomputing cluster 503. Thus, if one computing system goes down, anotherimmediately begins working in its place. The second (or subsequent)computing systems can remain operating a standby mode, listening to theoperating state of the first computing system, and can automaticallyfail over and take control of the system if the first computing systemfails. Dual power supplies ensure that the high availability computingcluster 503 has continuous power, as only one of the two power suppliesis needed to operate the high availability computing cluster and/or thegas panels 502 of the platform 501.

Using the designs shown in FIGS. 1-5, a highly scalable, redundantsystem is provided. The high availability computing cluster 503 canmanage substantially any number of gas panels, gas supply systems or gaspanel monitoring systems. The high availability computing cluster 503may be located on site, at a manufacturing facility, or may be locatedremotely. The high availability computing cluster 503 is easilyserviced, and can run on reduced or low processing power computersystems. This renders the system highly scalable and cost effective. Thesystems herein also provide enhanced inventory control. The systemsherein provide cradle-to-grave control of equipment inventory such asgas bottle. Once a bottle is scanned and recorded into the system, thelife of that bottle of potentially hazardous and expensive material ismonitored and recorded and tracked in the system. Video cameras recordand date specific aspects of the process. Monitoring operations may alsoraise the level of awareness of the technicians and other operators.Specialized reports may be generated on the software application 509 andmay be electronically delivered to managers.

Accordingly, systems, apparatuses and devices are provided whichincluding a gas supply system, a gas panel monitoring system and a gasdistribution platform. Any or all of these systems may implement a highavailability computing cluster that provides redundancy, scalability,communication and control features with electronic devices includingmobile phones.

The concepts and features described herein may be embodied in otherspecific forms without departing from their spirit or descriptivecharacteristics. The described embodiments are to be considered in allrespects only as illustrative and not restrictive. The scope of thedisclosure is, therefore, indicated by the appended claims rather thanby the foregoing description. All changes which come within the meaningand range of equivalency of the claims are to be embraced within theirscope.

I claim:
 1. A gas supply system, comprising: a gas panel defining anenclosure that includes a gas dispensing manifold, wherein gas flowthrough the gas dispensing manifold is regulated using one or moresolenoids; a redundant control system that is electrically connected tothe one or more solenoids, wherein the redundant control system isconfigured to send actuation signals to the solenoids to allow orprevent gas from flowing through the gas dispensing manifold, theredundant control system including at least one secondary, mirroredcontrol system configured to assume control of the gas panel on demand;and a communications module that allows the redundant control system tomonitor a plurality of other gas panels, the monitoring includingreceiving feedback from gas cabinet components regarding componentoperational status and transmitting actuation signals from the redundantcontrol system to the gas panel.
 2. The gas supply system of claim 1,wherein the gas panel further comprises one or more gas storage anddispensing vessels mounted in the enclosure and joined in gas flowcommunication with the gas dispensing manifold.
 3. The gas supply systemof claim 1, wherein the gas panel and the redundant control system arelocated in a secure room that is only accessible to authorized persons.4. The gas supply system of claim 3, wherein the authorized personsprovide credentials indicating proof of certifications that allow themto perform tasks within the enclosure of the gas panel.
 5. The gassupply system of claim 1, wherein the gas panel comprises a valvemanifold box (VMB) that controls pressure and flow of gases through thegas dispensing manifold, ensuring that pressure and flow to one or moreconnected tools is substantially constant.
 6. The gas supply system ofclaim 5, wherein the valve manifold box includes or is connected to anelectronic pressure regulator that controls gas pressure to an inlet ofa mass flow controller (MFC) which controls gas flow in the gas panel.7. The gas supply system of claim 6, wherein the electronic pressureregulator comprises at least one of a dome loaded pressure regulator oran electro-pneumatic pressure regulator, each of which is configured toreceive control signals issued by the redundant control system.
 8. Thegas supply system of claim 7, wherein pressure feedback readings at theMFC are provided to the dome loaded pressure regulator or to theelectro-pneumatic pressure regulator to control gas line pressure. 9.The gas supply system of claim 1, wherein the communications moduleprovides remote access to the redundant control system, allowing theredundant control system to be accessed via a portable electronicdevice.
 10. A gas panel monitoring system, comprising: one or morecameras positioned in view of at least one gas panel, the gas panelbeing located within a controlled access area; one or more cameraspositioned in view of an access door that allows entrance into to thecontrolled access area; an equipment recognition system configured todetermine whether pieces of equipment are being taken into thecontrolled access area and, if so, identify which pieces of equipmentare being taken into the controlled access area; and a controllerconfigured to monitor video feed data from the cameras to verify thatsafety protocol steps related to the identified pieces of equipment arebeing followed before access to the gas panel in the controlled accessarea is granted, wherein video feed data from the one or more cameraspositioned in view of the at least one gas panel, and video feed datafrom the one or more cameras positioned in view of the access door isprovided to a portable electronic device for monitoring.
 11. The gaspanel monitoring system of claim 10, further comprising an electronicidentification device configured to grant or prevent access to thecontrolled area based on electronic identifiers provided to theelectronic identification device.
 12. The gas panel monitoring system ofclaim 10, wherein the controller allows or prevents tasks from beingperformed on the gas panel based on the identity of one or more personswho are accessing the gas panel.
 13. The gas panel monitoring system ofclaim 10, further comprising a radio frequency identification (RFID)device configured to read RFID tags placed on gas panel equipment. 14.The gas panel monitoring system of claim 10, further comprising adisplay device configured to display video feed data from the one ormore cameras positioned in view of the at least one gas panel, and videofeed data from the one or more cameras positioned in view of the accessdoor.
 15. A gas distribution platform controlled via a high availabilitycomputing cluster, comprising: a plurality of gas panels each definingan enclosure including therein a gas dispensing manifold, wherein gasflow through the gas dispensing manifold is regulated using one or moresolenoids; a high availability computing cluster configured to receiveinformation from and communicate information to the plurality of gaspanels, the high availability computing cluster including: a firstcomputing system that controls one or more of the gas panels, the firstcomputing system having an assigned internet protocol (IP) address andbeing configured to host a web server via a shared IP address; a secondcomputing system that acts as a backup to the first computing system,the second computing system having an assigned IP address, wherein thefirst and second computing systems are interchangeable with each other,such that if the first computing systems fails, the second computingsystem will assume control of the one or more gas panels, and will takeover hosting the web server via the shared IP address; at least onesoftware application running independently on both the first and secondcomputing systems, the software application being configured to operatethe one or more gas panels; and a redundant hardware interfaceconfigured to communicate commands generated by the software applicationwith the one or more gas panels.
 16. The gas distribution platform ofclaim 15, wherein the first and second computing systems arehot-swappable.
 17. The gas distribution platform of claim 15, whereinthe second computing system is in a standby mode, listening to theoperating state of the first computing system.
 18. The gas distributionplatform of claim 15, further comprising a dual power supply unit thatincludes two separate power supplies, wherein only one of the two powersupplies is needed to operate the high availability computing clusterand/or the plurality of gas panels.